Edge ring assembly with dielectric spacer ring

ABSTRACT

An edge ring assembly surrounds a substrate support surface in a plasma etching chamber. The edge ring assembly comprises an edge ring and a dielectric spacer ring. The dielectric spacer ring, which surrounds the substrate support surface and which is surrounded by the edge ring in the radial direction, is configured to insulate the edge ring from the baseplate. Incorporation of the edge ring assembly around the substrate support surface can decrease the buildup of polymer at the underside and along the edge of a substrate and increase plasma etching uniformity of the substrate.

BACKGROUND

In the description that follows reference is made to certain structuresand methods, however, such references should not necessarily beconstrued as an admission that these structures and methods qualify asprior art under the applicable statutory provisions. Applicants reservethe right to demonstrate that any of the referenced subject matter doesnot constitute prior art.

In the field of semiconductor processing, plasma processing chambers arecommonly used to etch one or more layers formed on a substrate. Duringetching, the substrate is supported on a substrate support surfacewithin the chamber. Substrate supports can include edge rings positionedaround the substrate support (i.e., around the substrate) for confiningplasma to the volume above the substrate and/or to protect the substratesupport, which typically includes a clamping mechanism, from erosion bythe plasma. The edge rings, sometimes called focus rings, can besacrificial (i.e., consumable) parts. Conductive and non-conductive edgerings are described in commonly-owned U.S. Pat. Nos. 5,805,408;5,998,932; 6,013,984; 6,039,836 and 6,383,931.

Lithographic techniques can be used to form geometric patterns in asurface of a semiconductor substrate. During a lithographic process, apattern such as an integrated circuit pattern can be projected from amask or reticle and transferred to a photosensitive (e.g., photoresist)coating formed on a surface of the substrate. Plasma etching, in turn,can be used to transfer the pattern formed in the photoresist layer toone or more layers formed on the substrate that underlie the photoresistlayer.

During plasma etching, plasma is formed above the surface of a substrateby adding large amounts of energy to a gas (or gas mixture) at lowpressure. The plasma may contain ions, free radicals, and neutralspecies with high kinetic energies. By adjusting the electricalpotential of the substrate, charged species in the plasma can bedirected to impinge upon the surface of the substrate and thereby removematerial (e.g., atoms) therefrom.

Plasma etching can be made more effective by using gases that arechemically reactive with the material to be etched. So called “reactiveion etching” combines the energetic etching effects of the plasma withthe chemical etching effects of a reactive gas. However, during plasmaetching, in addition to etching one or more layers of semiconductormaterial, the photoresist layer can also be removed by the plasma.

Residue from the photoresist and/or polymer that may form as an etchingbyproduct may undesirably redeposit on a lateral edge (e.g., bevel edge)or underside of the substrate. Bevel polymer, which may be volatilizedduring subsequent processing, may have an adverse effect on processyield. In order to maximize yield, reduction in polymer buildup at theunderside and on the bevel edge of the substrate would be desirable.

SUMMARY

In a first embodiment, an edge ring assembly adapted to surround asubstrate support surface in a plasma etching chamber comprises an edgering dimensioned to underlie a peripheral portion of substrate locatedon a substrate support surface and provide a clearance gap between alower peripheral surface of the substrate and an upper surface of theedge ring, and a dielectric spacer ring between the edge ring and thesubstrate support surface dimensioned so as to provide a clearance gapbetween a lower surface of the substrate and an upper surface of thedielectric spacer ring.

When the edge ring assembly is mounted in a plasma etching chamber, anannular gap between the edge ring and the dielectric spacer ring and/oran annular gap between the dielectric spacer ring and the substratesupport surface is preferably less than 0.25 mm, and an upper surface ofthe dielectric spacer ring and an innermost upper surface of the edgering are preferably substantially co-planar.

The edge ring assembly is preferably configured such that the distancebetween the plane of the substrate support surface and the plane of theuppermost surface of the dielectric spacer ring is less than about 0.25mm, and the distance between the plane of the substrate support surfaceand the plane of the upper surface of a radially inner portion of theedge ring is less than about 0.25 mm. Thus, when a substrate ispositioned on the substrate support surface, a gap between a lowersurface of the substrate and an upper surface of the dielectric spacerring is preferably less than about 0.25 mm, and a gap between a lowersurface of the substrate and an upper surface of a radially innerportion of the edge ring is preferably less than about 0.25 mm. In anembodiment, a radially outer portion of the edge ring is thicker thanthe dielectric spacer ring.

In a further embodiment, a plasma etching chamber comprises an edge ringassembly adapted to surround a substrate support surface in the plasmaetching chamber. The substrate support preferably comprises anelectrostatic chuck on an upper surface of a baseplate forming a lowerelectrode. The edge ring assembly can overlie a coupling ring thatoverlies a peripheral portion of the baseplate. A substrate can bemounted on the substrate support surface such that the outer edge of thesubstrate overhangs the dielectric spacer ring and a radially innerportion of the edge ring.

A preferred dielectric spacer ring has a width (e.g., from about 0.5 to2.5 mm) effective to electrically insulate the edge ring from thebaseplate and a height (e.g., 1 to 3 mm) effective to minimize thedeposition of polymer in a gap between the dielectric spacer ring andthe substrate. At least one gas passage can extend through the couplingring or the baseplate, the gas passage being adapted to supply a heattransfer gas to an adjacent surface of the edge ring and/or thedielectric spacer ring.

A preferred plasma etching chamber comprises a parallel plate reactorhaving an upper showerhead electrode facing the substrate supportsurface. The baseplate can comprise an RF driven electrode and/or thesubstrate support surface can comprise an electrostatic chuck on anupper surface of a baseplate.

The edge ring assembly is preferably adapted to reduce at least one of(i) RF coupling between the edge ring and the baseplate, (ii) arcingbetween the edge ring and the baseplate, and (iii) polymer deposition onan underside and/or edge of a substrate supported on the substratesupport surface.

A method of etching a layer on a semiconductor substrate in a plasmaetching chamber having an edge ring assembly comprises supporting thesubstrate on a substrate support surface positioned inside the chamber,supplying etching gas to the chamber, energizing the etching gas into aplasma state adjacent an exposed surface of the substrate, and etchingone or more layers on the semiconductor substrate with the plasma. Dueto plasma erosion of the dielectric spacer ring, the dielectric spacerring can be removed from the chamber and replaced with anotherdielectric spacer ring after etching a predetermined number ofsemiconductor substrates.

According to yet a further embodiment, a dielectric spacer ring isdimensioned so as to provide a clearance gap between a lower surface ofa substrate located on a substrate support surface in a plasma etchingchamber and an upper surface of the dielectric spacer ring, thedielectric spacer ring being further dimensioned so as to be surroundedby an edge ring dimensioned so as to underlie the substrate and providea clearance gap between a lower surface of the substrate and an uppersurface of the edge ring.

An upper surface of the dielectric spacer ring and an innermost uppersurface of the edge ring are preferably substantially co-planar when thedielectric spacer ring and the edge ring are mounted in the plasmaetching chamber.

The dielectric spacer ring can be bonded to an upper surface of acoupling ring or to an upper surface of a baseplate, and either or bothof the dielectric spacer ring and the coupling ring can be made ofquartz. In a further embodiment, the dielectric spacer ring can comprisean axially upward-extending portion formed on a radially inner surfaceof a coupling ring.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an illustration of a parallel plate plasma etch reactor.

FIG. 2 shows a parallel plate plasma etch reactor comprising an edgering assembly mounted on a coupling ring according to one embodiment.

FIG. 3 shows a parallel plate plasma etch reactor comprising an edgering assembly according to a further embodiment.

FIG. 4 shows a parallel plate plasma etch reactor comprising an edgering assembly mounted on a baseplate according to another embodiment.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

In a parallel plate plasma etch reactor wherein process gas is suppliedthrough a showerhead electrode and a semiconductor substrate supportedon a bottom electrode is plasma etched by plasma generated by supplyingRF energy to the showerhead and/or bottom electrode, plasma uniformitycan be affected by RF coupling between the bottom electrode and theplasma.

To improve the plasma uniformity, an edge ring assembly surrounds asubstrate support surface in the plasma etch reactor. The edge ringassembly comprises an edge ring and a dielectric spacer ring arrangedsuch that the dielectric spacer ring surrounds the substrate supportsurface and the edge ring surrounds the dielectric spacer ring.Incorporation of the edge ring assembly around the substrate supportsurface can decrease the buildup of polymer at the underside and alongthe edge of a substrate and/or increase plasma etching uniformity of thesubstrate.

In a preferred embodiment, the dielectric spacer ring is a separate partthat rests on a surface of a member that surrounds the substrate supportsurface. The member can be a coupling ring that underlies the dielectricspacer ring and the edge ring, or a portion of the baseplate. In analternate embodiment, the dielectric spacer ring can be bonded to themember such as via a thermally conductive elastomer bond. In a stillfurther preferred embodiment, the dielectric spacer ring and a couplingring can comprise a unitary part.

By providing a dielectric spacer ring, RF coupling can be reducedbetween the edge ring and the baseplate. Further, as explained in moredetail below, insertion of a dielectric spacer ring between thesubstrate support surface and the edge ring can reduce the propensity ofarcing between a conductive edge ring and the substratesupport/baseplate and/or reduce the deposition of polymer on theunderside and/or edge of a substrate that is supported on the substratesupport surface during plasma etching of the substrate. A plasma etchchamber comprises the edge ring assembly, and a method of etching asemiconductor substrate comprises etching the semiconductor substrate ina plasma etch chamber comprising the edge ring assembly.

The edge ring assembly is adapted to surround a substrate supportsurface in a plasma etch reactor. During plasma etching of a substratethat is supported or clamped on the substrate support surface, the edgering assembly can focus plasma over the substrate and/or focus RF powerthrough the substrate. It is believed that the edge ring assembly canimprove plasma etch performance and decrease wear of plasma reactorcomponents. Further, the dielectric spacer ring and the edge ring can bedisposable parts that can protect the substrate support and/or baseplatefrom plasma erosion.

Plasma chambers are generally used for etching layers of materials onsubstrates by supplying an etching gas comprising one or more gases tothe chamber and applying energy to the etching gas to energize the gasinto a plasma state. Various plasma chamber designs are known whereinradio frequency (RF) energy, microwave energy and/or magnetic fields canbe used to produce and sustain medium density or high density plasma.

The edge ring assembly can be incorporated in inductively coupled,helicon, electron cyclotron resonance, parallel plate, or other types ofplasma chambers. For instance, high density plasma can be produced in atransformer coupled plasma (TCP™) reactor, or in an electron cyclotronresonance (ECR) reactor. Transformer coupled plasma reactors, wherein RFenergy is inductively coupled into the reactor, are available from LamResearch Corporation, Fremont, Calif. An example of a high-flow plasmareactor that can provide high density plasma is disclosed incommonly-owned U.S. Pat. No. 5,948,704, the disclosure of which ishereby incorporated by reference. Parallel plate reactors,electron-cyclotron resonance (ECR) reactors, and transformer coupledplasma (TCP™) reactors are disclosed in commonly-owned U.S. Pat. Nos.4,340,462; 4,948,458; 5,200,232 and 5,820,723, the disclosures of whichare hereby incorporated by reference.

By way of example, plasma can be produced in a parallel plate etchreactor such as the dual frequency plasma etch reactor described incommonly-owned U.S. Pat. No. 6,090,304, the disclosure of which ishereby incorporated by reference. A preferred parallel plate plasmaetching chamber is a dual frequency capacitively coupled plasma reactorincluding an upper showerhead electrode and a lower electrode, the lowerelectrode (e.g., baseplate) having a substrate support such as anelectrostatic chuck incorporated in an upper surface thereof. Forpurposes of illustration, embodiments of the edge ring assembly aredescribed herein with reference to a parallel plate type plasma etchchamber.

A parallel plate plasma etch reactor is illustrated in FIG. 1. Theplasma etch reactor 100 comprises a chamber 110, an inlet load lock 112,and an optional outlet load lock 114, further details of which aredescribed in commonly-owned U.S. Pat. No. 6,824,627, which is herebyincorporated by reference in its entirety.

The load locks 112 and 114 (if provided) include transfer devices totransfer substrates such as wafers from a wafer supply 162, through thechamber 110, and out to a wafer receptacle 164. A load lock pump 176 canprovide a desired vacuum pressure in the load locks 112 and 114.

A vacuum pump 172 such as a turbo pump is adapted to maintain a desiredpressure in the chamber. During plasma etching, the chamber pressure iscontrolled, and preferably maintained at a level sufficient to sustain aplasma. Too high a chamber pressure can disadvantageously contribute toetch stop while too low a chamber pressure can lead to plasmaextinguishment. In a medium density plasma reactor, such as a parallelplate reactor, preferably the chamber pressure is maintained at apressure below about 200 mTorr (e.g., less than 100 mTorr or less than50 mTorr).

The vacuum pump can be connected to an outlet in a wall of the reactorand can be throttled by a valve 173 in order to control the pressure inthe chamber. Preferably, the vacuum pump is capable of maintaining apressure within the chamber of less than 200 mTorr while etching gasesare flowed into the chamber.

The chamber 110 includes an upper electrode assembly 120 including anupper electrode 125 (e.g., showerhead electrode), and a lower electrodeassembly 140 including a baseplate (i.e., lower electrode) 160 and asubstrate support surface 150 formed in an upper surface thereof. Theupper electrode assembly 120 is mounted in an upper housing 130. Theupper housing 130 can be moved vertically by a mechanism 132 to adjustthe gap between the upper electrode 125 and the substrate supportsurface 150.

A etching gas source 170 can be connected to the housing 130 to deliveretching gas comprising one or more gases to the upper electrode assembly120. In a preferred etch reactor, the upper electrode assembly comprisesa gas distribution system, which can be used to deliver reactant and/orcarrier gases to a region proximate to the surface of a substrate. Gasdistribution systems, which can comprise one or more gas rings,injectors and/or showerheads (e.g., showerhead electrodes), aredisclosed in commonly-owned U.S. Pat. Nos. 6,333,272; 6,230,651;6,013,155 and 5,824,605, the disclosures of which are herebyincorporated by reference.

The upper electrode 125 preferably comprises a showerhead electrode,which includes apertures (not shown) to distribute etching gastherethrough. The showerhead electrode can comprise one or morevertically spaced-apart baffle plates that can promote the desireddistribution of etching gas. The upper and lower electrodes may beformed of any suitable material such as graphite, silicon, siliconcarbide, aluminum (e.g., anodized aluminum), or combinations thereof. Aheat transfer liquid source 174 can be connected to the upper electrodeassembly 120 and another heat transfer liquid source can be connected tothe baseplate 160.

Commonly-owned U.S. Pat. No. 6,019,060, the disclosure of which ishereby incorporated by reference, discloses a plasma confinement ringassembly. Due to plasma confinement over the substrate undergoingetching, the pressure at the substrate surface may be higher than thevacuum pressure set for the reactor chamber. To maintain a low chamberpressure, preferably inert carrier gas is added to the chamber at a flowrate of from about 50 to 500 standard cubic centimeters per minute(sccm). The individual flow rates of the individual reactive componentsof an etching gas mixture typically range from about 1 to 200 sccm for a200 mm substrate, and higher for larger substrates.

Plasma density refers to the density of positive ions within the plasmaetching region. Generally, plasma density is a function of the powerprovided to the electrodes. A higher power tends to create a higherdensity of plasma that, depending on other parameters, may increase theetch rate of layers previously formed on a substrate by producing alarge flux of ions to the substrate surface. Medium density plasma canbe characterized as comprising an ion density of from about 10¹⁰ to 10¹¹ions/cm³, while high density plasma typically can have an ion density offrom about 10¹¹ to 10¹² ions/cm³ or more.

In some embodiments, the upper electrode or the lower electrode can bethe powered electrode, while the other of the lower electrode or theupper electrode is the electrically grounded (return path) electrode. Inother embodiments, both the upper electrode and lower electrode can bepowered, with the two electrodes powered out of phase with respect tovoltage from each other. In a parallel plate reactor, a power source 178can provide radio frequency (RF) power to the upper electrode 125 and/orbaseplate (i.e., lower electrode) 160.

The reactor can be a single-frequency, dual-frequency or multi-frequencyplasma reactor. In a dual-frequency plasma reactor, for example, plasmacan be generated by supplying RF power at two different frequenciesthrough match networks to the upper and/or lower electrodes. As anexample, a lower frequency such as 2 MHz can be supplied to the lowerelectrode, and a higher frequency such as 27 MHz can be supplied to theupper electrode. Alternatively, the upper electrode can be electricallygrounded and RF power at two or more different frequencies (e.g., about10-60 MHz and less than about 10 MHz) can be supplied to the lowerelectrode.

A continuous or a discontinuous RF bias can be applied to the substrateduring etching. The RF bias can determine the energy at which positiveion flux impinges the substrate surface. The RF power preferably rangesfrom about 50 to 3000 watts, and the RF bias power applied to the lowerelectrode can range from 0 to 3000 watts for a 200 mm substrate.Preferably, the lower electrode has a surface area so that the RF biaspower can supply about 0-8 watts/cm² and preferably at least 2 watts/cm²of power to the substrate.

By supplying RF power to the lower electrode, a DC sheath voltage can beformed with respect to the surface of the substrate. The sheath voltageis a function of the bias power and is essentially independent of plasmageneration. High bias powers generate large sheath voltages, and duringetching can result in energetic ion bombardment of the substratesurface.

The gap width between the electrodes in a parallel plate reactor canaffect the etch rate of a dielectric layer. Selection of a desired gapwidth depends in part upon the chamber pressure used during etching.Typically, at higher chamber pressures (e.g., from about 75 mTorr to 1Torr), a preferred gap width is from about 1 to 1.5 cm. At lower chamberpressures (e.g., below about 75 mTorr), a higher gap width, such as agap width of from about 1.3 to 2.5 cm, can be used. Also, the gap widthcan be selected as a function of the frequency applied to theelectrodes. Generally, for the etching of dielectric layers, lower gapwidths are more preferred for higher frequencies and higher gap widthsare more preferred for lower frequencies. In a medium density parallelplate reactor, the gap between the upper electrode and the lowerelectrode supporting the substrate can be from about 1 to 2.5 cm.

Details of the lower electrode assembly 240, including an edge ringassembly 270 according to a first embodiment, are shown in FIG. 2. Thelower electrode assembly 240 comprises a baseplate 260 having a flange262, and a substrate support 250 such as an electrostatic chuck (ESC)comprising a substrate support surface 254 formed in an upper surface ofthe baseplate. The baseplate (lower electrode) can comprise a conductivematerial and the ESC can comprise a ceramic material having an electrode252 buried therein. The ESC can be bonded to an upper surface of thebaseplate. The lower electrode can be powered by an RF source andattendant circuitry for providing RF matching, etc. The lower electrodeis preferably temperature controlled and may optionally include aheating arrangement. Substrate support surface 254 is adapted to supporta single semiconductor substrate such as a 200 mm or 300 mm wafer.

As shown in the FIG. 2 embodiment, edge ring 280 and dielectric spacerring 285 are supported on an upper surface of coupling ring 290 such asa quartz coupling ring, which rests on the flange 262 of baseplate 260.The coupling ring 290 can be supported on the baseplate with or withoutmechanical or adhesive fastening such as a plurality of bolts 224. Asubstrate 210 can be supported/clamped on the substrate support surfaceso as to preferably overhang the dielectric spacer ring 285 and at leasta radially inner portion 281 of the edge ring 280.

The substrate support 250 preferably includes passages therein forsupplying helium between substrate 210 and support surface 254 to coolsubstrate 210 during plasma etching thereof in an amount sufficient toprevent burning of photoresist on the substrate. Preferably, thesubstrate is maintained at a temperature of less than about 140° C.during plasma etching. In medium density plasma reactors, the substratesupport is preferably cooled to a temperature of from about −20 to 80°C. so as to maintain the substrate at a desired temperature.

In order to maintain the substrate at a desired temperature, helium canbe supplied at a pressure from about 1 to 30 Torr in the space betweenthe substrate and the substrate support surface. Further, the substratetemperature may be controlled by regulating the level of the RF bias andthe ESC temperature and other parameters as described herein. A methodof controlling a temperature of a substrate by introducing a pressurizedgas into a space between the substrate and the substrate support surfaceis disclosed in commonly-owned U.S. Pat. No. 6,140,612, the disclosureof which is hereby incorporated by reference.

The coupling ring 290 may optionally comprise an edge ring chuck (notshown) located in an upper surface thereof. The edge ring chuck, ifprovided, can be a monopolar or a bipolar chuck and can be supplied withDC power by a DC power supply using suitable electrical connections. Theedge ring chuck can be used to secure the edge ring 280, such as asilicon edge ring to the coupling ring. Details of anelectrostatically-clamped edge ring are disclosed in commonly-owned U.S.Pat. No. 6,475,336, the disclosure of which is hereby incorporated byreference.

The edge ring 280 can be made from a semiconducting or electricallyconductive material such as silicon (e.g., single crystal silicon orpolycrystalline silicon) or silicon carbide (e.g., chemical vapordeposited silicon carbide). Because the edge ring will be exposeddirectly to the plasma, preferred edge rings are made from high puritymaterials. Additional materials for the edge ring include aluminumoxide, aluminum nitride, silicon nitride, quartz, etc. The edge ring maybe electrically floating or may be electrically coupled to a DC ground.

In order to reduce exposure of the substrate support and/or baseplate tothe ions/reactive species in the plasma, preferably the substratesupport is sized such that the substrate overhangs the substrate supportsurface. Referring still to FIG. 2, the substrate, which can overhangthe substrate support surface by about 1 to 2 mm, overhangs both thedielectric spacer ring 285 and a radially inner portion 281 of the edgering 280 (e.g., the dielectric spacer ring and a portion of the edgering extend under the periphery of the substrate). Thus, the dielectricspacer ring preferably has a radial width that is less than the amountthat the substrate overhangs the substrate support surface.

In a preferred edge ring assembly, the radially inner edge of the edgering 280 contacts or is located close to the radially outer edge of thedielectric spacer ring 285, and the radially inner edge of thedielectric spacer ring 285 contacts or is located close to the outeredge of the substrate support and/or baseplate 260. By close to is meantthat a gap (e.g., an annular gap) between the edge ring and thedielectric spacer ring or a gap between the dielectric spacer ring andthe substrate support surface is less than about 0.25 mm, morepreferably less than about 0.12 mm. Thus, the dielectric spacer ring andthe edge ring substantially cover the top surface of the coupling ring290 (or edge ring chuck if provided) so that exposure of the top surfaceof the coupling ring to reactive species and/or ions of the plasma canbe reduced. In an embodiment, the dielectric spacer ring can be bondedto the coupling ring (i.e., an upper surface of the coupling ring can bebonded to a lower surface of the dielectric spacer ring).

A heat transfer gas such as helium can be used to improve thermaltransfer between the edge ring assembly and the baseplate. The heattransfer gas can be supplied from gas source 230 via gas passage 232 tothe interface between the edge ring assembly and the coupling ring 290and/or to the interface between the coupling ring 290 and the baseplate260. The gas passage 232 can extend through the baseplate 260 andcoupling ring 290 at one or more locations spaced around the baseplate260, e.g., extending through passages in bolts 224.

In embodiments where there is a gap between the substrate support andthe dielectric spacer ring and/or between the dielectric spacer ring andthe edge ring, helium flow in the gap(s) can reduce the entry of etchinggas and/or volatile byproducts therein and thus reduce the deposition ofpolymer during plasma etching.

Referring still to FIG. 2, an inner surface of the edge ring spacedoutwardly of the substrate is preferably shaped to form an angle with aplane substantially perpendicular to the substrate surface. Thus, apreferred edge ring comprises a radially inner portion 281 and aradially outer portion wherein the thickness of the radially innerportion is less than the thickness of the radially outer portion, andthe thickness of the radially outer portion is greater than thethickness of the dielectric spacer ring. An upper surface of thedielectric spacer ring and an upper surface of the radially innermostportion of the edge ring are preferably positioned as close as possibleto the underside of the substrate. According to a preferred embodiment,an upper surface of the dielectric spacer ring and a radially innermostupper surface of the edge ring are substantially co-planar andconfigured to underlie that portion of a substrate that overhangs thesubstrate support surface. Alternatively, an upper surface of thedielectric spacer ring can be higher or lower than an upper radiallyinner surface of the edge ring.

A clearance gap between the dielectric spacer ring and the substrate andbetween a radially inner portion of the edge ring and the substrateallows for thermal expansion of the dielectric spacer ring and the edgering during plasma etching. Preferably, there is a clearance gap Gbetween an upper surface of the dielectric spacer ring and the bottomsurface of the substrate, and a clearance gap G′ between an upper innersurface of the edge ring and the bottom surface of the substrate. It isdesirable to provide sufficient clearance between the dielectric spacerring and the substrate and between the edge ring and the substrate sothat during etching thermal expansion of the dielectric spacer ringand/or the edge ring does not lift the substrate off the substratesupport surface.

Preferred dielectric spacer rings have a width effective to electricallyinsulate the edge ring from the baseplate and a height effective tominimize the gap (G) between the dielectric spacer ring and thesubstrate during plasma etching of the substrate. By minimizing the gapG, polymer deposition on the underside or bevel edge of the substratecan be minimized.

The dielectric spacer ring can have a square cross section or arectangular cross section. Exemplary dielectric spacer rings have awidth of about 0.5 mm to 2.5 mm, more preferably about 0.8 to 1.2 mm,and a height of from about 1 to 3 mm, more preferably about 2.4 to 2.8mm. According to a preferred embodiment, the dielectric spacer ring isadapted to fit beneath the overhang of a substrate mounted on thesubstrate support surface with a clearance gap (G) between thedielectric spacer ring and the substrate of less than about 0.25 mm.According to a further preferred embodiment, the distance between theplane of the substrate support surface and the plane of the uppersurface of the dielectric spacer ring is preferably less than about 0.25mm, and the distance between the plane of the substrate support surfaceand the plane of the upper surface of a radially inner portion of theedge ring is preferably less than about 0.25 mm.

Materials suitable for use as the dielectric spacer ring include ceramicmaterials such as silicon oxide (e.g., quartz) or aluminum oxide, andpolymer materials such as DuPont® Vespel®, DuPont® Kapton®, and thelike. A preferred dielectric spacer ring is made from quartz.

According to a further embodiment, an alternate geometry for the edgering assembly comprises a modified coupling ring. Referring to FIG. 3,lower electrode assembly 340 comprises a modified coupling ring 390′including an axially upward extending portion 385 on an inner radialsurface thereof. Compared with the FIG. 2 embodiment, which comprises aseparate coupling ring and dielectric spacer ring, in the FIG. 3embodiment the coupling ring and the dielectric spacer ring areconfigured as an integral, unitary part mounted on the baseplate 360.Thus, the axially upward extending portion 385 of the modified couplingring is adapted to replace a separate dielectric spacer ring. Themodified coupling ring 390′ can be supported on baseplate 360 with orwithout mechanical or adhesive fastening.

In the FIG. 3 embodiment, edge ring 380, which can be substantiallyidentical to the edge ring described in reference to the FIG. 2embodiment, rests on an outer flanged portion of the modified couplingring 390′. The modified coupling ring 390′, which can be made of quartz,can rest on or be attached to (e.g., via bolts 324) a flanged portion362 of baseplate 360.

A heat transfer gas such as helium can be used to improve thermaltransfer between the modified coupling ring assembly and the baseplate.The heat transfer gas can be supplied from gas source 330 via gaspassage 332 to the interface between the modified coupling ring 390′ andthe baseplate 360 and/or to the interface between the modified couplingring 390′ and the edge ring 380. The gas passage 332 can extend throughthe baseplate 360 and modified coupling ring 390′ at one or morelocations spaced around the baseplate 360, e.g., extending throughpassages in bolts 324.

An upper inner surface of the edge ring 380 spaced outwardly of thesubstrate is preferably shaped to form an angle with a planesubstantially perpendicular to the substrate surface. Substrate support350 can comprise an ESC having a substrate support surface 354 and anelectrode 352 buried therein. The ESC can be bonded to an upper surfaceof the baseplate 360.

The radial inner surface 382 of edge ring 380 contacts or is locatedclose to the radial outer surface 386 of the axially upward extendingportion 385, and the radial inner surface 387 of the axially upwardextending portion 385 contacts or is located close to the radially outersurface of the substrate support 350 and/or baseplate 360.

Both the radially inner portion 381 of the edge ring 380 and the upwardaxially extending portion 385 of the modified coupling ring 390′ extendunder an overhanging portion of substrate 310. According to a preferredembodiment, an upper surface of the axially upward extending portion 385and an innermost upper surface of the edge ring are substantiallyco-planar and configured to underlie that portion of a substrate thatoverhangs the substrate support surface. Alternatively, an upper surfaceof the axially upward extending portion 385 of the modified couplingring 390′ can be higher or lower than an upper inner surface of the edgering. Preferably, there is a clearance gap G between an upper surface ofthe axially upward extending portion 385 and the bottom surface of thesubstrate, and a clearance gap G′ between an upper inner surface of theedge ring 380 and the bottom surface of the substrate.

According to a preferred embodiment, the axially upward extendingportion 385 of the modified coupling ring 390′ is adapted to fit beneaththe overhang of a substrate mounted on the substrate support surfacewith a clearance gap (G) that is less than about 0.25 mm.

Exemplary operating conditions for a plasma etch reactor for etching adielectric material such as SiO₂ are as follows: wafer diameter of about200 mm or 300 mm; dielectric material thickness on the substrate of atleast about 200 nm; dielectric material density of at least about 90% oftheoretical density; lower electrode temperature of from about 0° C. toabout 90° C.; chamber pressure of from about 0 Torr to 2 Torr,preferably up to about 200 mTorr; substrate temperature of from about20° C. to 200° C., preferably 20° C. to 50° C.; etching gas flow rate offrom about 10 sccm to 1,000 sccm; total dual-frequency power deliveredbetween the upper electrode and the lower electrode of at least about2,500 watts; and etch time for dielectric material of at least about 1minute.

Various etching gases can be used to etch different dielectricmaterials. The etching gas can include one or more halogen-containinggases, one or more oxygen-containing gas and/or one or morenitrogen-containing gas. Typical etching gas mixtures can include, e.g.,chlorine-containing gases such as, but not limited to, Cl₂, HCl andBCl₃; fluorine-containing gases such as, but not limited to, CF₄, C₂F₆,C₃F₈, C₄F₈, CHF₃, CH₂F₂, CH₃F, NF₃ and SF₆; oxygen-containing gases suchas, but not limited to, O₂, CO, H₂O and SO₂; nitrogen-containing gasessuch as, but not limited to, N₂, NH₃, and inert and other gases such as,but not limited to He, Ne, Kr, Xe, and Ar.

The etching gas mixture preferably includes an inert carrier gas. Duringthe plasma etching of dielectric materials such as oxides, nitrides, orcombinations thereof, the carrier gas can sputter the dielectricmaterial, which can advantageously increase the overall etch rate. Heavynoble gases have a low ionization potential and form ions that canenhance the sputter rate at a given RF power. Moreover, the lowionization potential of the noble gas can help generate uniform plasmaover the surface of the substrate. Exemplary carrier gases includehelium, neon, argon, krypton and/or xenon. Argon is a preferred inertcarrier gas. These and other gases may be used in combination in anetching gas mixture.

An example of a dielectric etch process carried out in a 2300 Exelan® orExelan® HPT dual frequency medium density parallel plate plasma chamberavailable from Lam Research Corporation, Fremont, Calif. is set forthbelow wherein the etching gas chemistry in a main etch step is a mixtureof octafluorocyclobutane (C₄F₈), difluoromethane (CH₂F₂), nitrogen (N₂)and argon (Ar). Additional etch steps, which may comprise additionaletching gases, can be used. Although the optimal flow rates and ratiosof the gas mixture may change depending on the choice of plasma etchreactor, substrate size, etc., in the case of etching a silicon oxidelayer on a 300 mm silicon wafer, the individual constituents of theetching gas can be supplied to the reactor chamber at flow rates of 2 to20 sccm hexafluoro-1,3-butadiene (C₄F₆); 2 to 20 sccm C₄F₈; 1 to 10 sccmCH₂F₂; 50 to 200 sccm tetrafluoromethane (CF₄); 50 to 200 sccm N₂; 200to 800 sccm Ar; 100 to 400 carbon monoxide (CO); and 100 to 400 oxygen(O₂). During etching, the chamber pressure can be set at 1 to 500 mTorr,preferably 5 to 200 mTorr. The ratio of the flow rate of C₄F₈ to theflow rate of CH₂F₂ during the main etch step can be 0.5 to 4, preferably1 to 3 to achieve a desired degree of selectivity with respect to otherlayers of the etched structure.

During dielectric etching, the upper electrode is preferablyelectrically grounded and RF power at one or more power levels (andfrequencies) is supplied to the lower electrode. Further, the upperelectrode preferably comprises a showerhead electrode that can comprisea dual gas feed configuration wherein the showerhead electrode comprisestwo or more gas feed through zones, such as a center zone and radial(edge) zone surrounding the center zone. In a dual gas feed arrangement,the flow rate of etching gas though a center zone and through asurrounding circumferentially extending edge zone can be controlled(i.e., the flow rate ratio can be controlled). An example of a plasmaetch reactor comprising a showerhead electrode having a dual gas feedarrangement is disclosed in commonly-owned U.S. Pat. No. 6,245,192, thedisclosure of which is herein incorporated by reference.

The dielectric layer can comprise silicon nitride, un-doped or dopedsilicon oxide (such as fluorinated silicon oxide), spin-on glass,silicate glasses such as boron phosphate silicate glass (BPSG) orphosphate silicate glass (PSG), un-doped or doped thermally grown oxide,un-doped or doped tetraethoxyorthosilicate (TEOS) deposited siliconoxide, and inorganic or organic low dielectric constant (i.e., low-k)layers. Such layers can form part of a damascene structure. Dopants fordielectric materials can include, but are not limited to, boron,fluorine, phosphorus and/or arsenic.

The dielectric layer can be formed on a semiconductor substrate or thedielectric layer can be formed on a conductive or semiconductive layer.For instance, the dielectric layer can overlie a conductive orsemiconductive layer such as polycrystalline silicon, a metal layercomprising aluminum, copper, titanium, tungsten, molybdenum, nitridessuch as titanium nitride, silicides such as titanium silicide, cobaltsilicide, tungsten silicide, molybdenum silicide, and the like.

FIG. 4 shows a variation on how the edge ring assembly can be mounted onthe baseplate rather than on a coupling ring. As shown in FIG. 4, thedielectric spacer ring 485 and edge ring 480 of an edge ring assembly470 are supported on a surface of the baseplate 460 and a substrate 410is supported on a support surface 454 of substrate support 450, which isincorporated in a central portion of the baseplate 460 such that thesurface of the substrate support is vertically higher than uppersurfaces of the components of the edge ring assembly underlying asubstrate overhang. To promote heat transfer from the edge ring assembly470 to the baseplate 460, a gas supply 430 can supply a heat transfergas through one or more passages 432 into an interface between thecomponents of the edge ring assembly and the baseplate and/or substratesupport. A preferred heat transfer gas is helium.

It is believed that the edge ring assembly can be used to achieve moreuniform plasma etching of semiconductor substrates. In particular, theedge ring assembly can be used to manipulate the RF impedance path nearthe edge of a substrate. The RF impedance path can be controlled by thechoice of materials for the dielectric spacer ring and the edge ring.

Generally, the RF impedance path from a powered lower electrode throughboth the substrate support and the substrate to the plasma can bedifferent than the RF impedance path from a peripheral portion of thelower electrode to the plasma. Edge effects from the substrate supportand the substrate can result in a non-uniform plasma density across thesubstrate, which can result in non-uniform etching.

Without wishing to be bound by theory, it is believed that thedielectric spacer ring reduces RF coupling into the edge ring andincreases RF coupling into the periphery of the substrate. By increasingRF coupling into the periphery of the substrate, the etch rate at theperiphery of the substrate can be increased. Incorporation of thedielectric spacer ring around the substrate support also decreases thebuildup of polymer at the underside and along the edge of the substrate.Such polymer is typically generated during the etch steps (e.g., as abyproduct of etching photoresist and/or dielectric material).

The buildup of bevel polymer (e.g., polymer at the underside and or edgeof the substrate) was measured after completing dielectric etching.Without incorporating a dielectric spacer ring around the substratesupport, 55-65 nm of bevel polymer buildup was observed after completingthe etch process for standard over-etch times of 10 seconds (firstover-etch) and 30 seconds (second over-etch). Increased bevel polymerbuildup was observed by increasing the over-etch times.

The use of a dielectric spacer ring resulted in a decrease in the amountof bevel polymer buildup. By incorporating a dielectric spacer ring(2.62 mm height×0.965 mm width) between the edge ring and the substratesupport, the substrate was substantially free of bevel polymer after thestandard over-etch as well as after a 50% increase in the standardover-etch times (i.e., a first over-etch of 15 seconds and a secondover-etch of 45 seconds). After further increases in the over-etchtimes, however, bevel polymer build-up was observed. Table 1 summarizesthe extent of bevel polymer buildup (measured in nanometers, nm) as afunction of over-etch times in conjunction with the preferred dielectricetch process.

TABLE 1 Effect of dielectric spacer ring on bevel polymer buildup BevelPolymer Overetch (without dielectric spacer Bevel Polymer Conditionring) (with dielectric spacer ring) Standard 55-65 nm   None  +50% >65nm None  +75% >65 nm ~16 nm +100% >65 nm ~30 nm +200% >65 nm ~75 nm

A preferred method of etching a semiconductor substrate in a plasmaetching chamber comprises mounting a substrate on a support surface of asubstrate support within the plasma etching chamber, supplying etchinggas into the chamber, energizing the etching gas so as to generateplasma adjacent an exposed surface of the substrate and etching thesubstrate with the plasma, wherein an edge ring assembly comprising anedge ring and a dielectric spacer ring surrounds the substrate support.The edge ring surrounds the substrate support and the dielectric spacerring is interposed between the edge ring and the substrate support.Because the dielectric spacer ring is a consumable part, it can beremoved from the chamber and replaced with another dielectric spacerring after etching a predetermined number of semiconductor substrates.

While the electrodes have been referred to and depicted in the Figuresas “upper” or “lower” electrodes, a plasma etching chamber having anedge ring assembly incorporated therein can be constructed such that thesubstrate being etched is held (i.e., clamped) with its processed sidefacing down rather than up. Further, the edge ring assembly can be usedto etch non-circular substrates.

The terms “comprises” and “comprising” as used herein are taken tospecify the presence of stated features, steps, or components; but theuse of these terms does not preclude the presence or addition of one ormore other features, steps, components, or groups thereof.

All of the above-mentioned references are herein incorporated byreference in their entirety to the same extent as if each individualreference was specifically and individually indicated to be incorporatedherein by reference in its entirety.

While the invention has been described with reference to preferredembodiments, it is to be understood that variations and modificationsmay be resorted to as will be apparent to those skilled in the art. Suchvariations and modifications are to be considered within the purview andscope of the invention as defined by the claims appended hereto.

1. An edge ring assembly adapted to surround a substrate support surfacein a plasma etching chamber comprising: an edge ring dimensioned so asto underlie a substrate located on a substrate support surface in thechamber and provide a clearance gap between a lower surface of thesubstrate and an upper surface of the edge ring; and a dielectric spacerring between the edge ring and the substrate support surface dimensionedso as to provide a clearance gap between a lower surface of a substratelocated on the substrate support surface and an upper surface of thedielectric spacer ring wherein the dielectric spacer ring comprises anaxially upward extending portion formed on a radially inner surface of acoupling ring.
 2. (canceled)
 3. The edge ring assembly of claim 1,wherein a radial gap between the edge ring and the dielectric spacerring and/or a radial gap between the dielectric spacer ring and thesubstrate support surface is less than 0.25 mm.
 4. (canceled) 5.(canceled)
 6. The etch ring assembly of claim 1, wherein an uppersurface of the dielectric spacer ring and an innermost upper surface ofthe edge ring are substantially co-planar when the dielectric spacerring and the edge ring are mounted in the chamber.
 7. (canceled)
 8. Theedge ring assembly of claim 1, wherein the edge ring is made fromsilicon, silicon carbide, aluminum oxide, aluminum nitride, siliconnitride, quartz or combinations thereof and the coupling ring is made ofquartz.
 9. The edge ring assembly of claim 1, wherein a radially outerportion of the edge ring is thicker than the dielectric spacer ring. 10.The edge ring assembly of claim 1, further comprising at least one gaspassage extending through the baseplate, the gas passage being adaptedto supply a heat transfer gas to an adjacent surface of the edge ringand/or the dielectric spacer ring.
 11. A plasma etching chamberincluding the edge ring assembly of claim 1 comprising: a substratesupport having a substrate support surface; the edge ring dimensioned soas to underlie a substrate and provide a clearance gap between a lowersurface of a substrate located on the substrate support surface in thechamber and an upper surface of the edge ring; and the dielectric spacerring between the edge ring and the substrate support surface dimensionedso as to provide a clearance gap between a lower surface of a substratelocated on the substrate support surface and an upper surface of thedielectric spacer ring.
 12. (canceled)
 13. (canceled)
 14. The plasmachamber of claim 11, wherein the distance between a plane of thesubstrate support surface and a plane of the upper surface of thedielectric spacer ring is less than about 0.25 mm, and the distancebetween a plane of the substrate support surface and a plane of theupper surface of a radially inner portion of the edge ring is less thanabout 0.25 mm.
 15. (canceled)
 16. The plasma chamber of claim 11,wherein the plasma etching chamber comprises a parallel plate reactorhaving an upper showerhead electrode facing the substrate support. 17.The plasma chamber of claim 11, wherein the substrate support comprisesan RF driven electrode and/or an electrostatic chuck.
 18. (canceled) 19.The plasma chamber of claim 11, wherein the edge ring assembly isadapted to reduce at least one of (i) RF coupling between the edge ringand the baseplate, (ii) arcing between edge ring and the baseplate, and(iii) polymer deposition on an underside and/or edge of a substratesupported on the substrate support surface.
 20. A method of etching alayer formed on a semiconductor substrate in the plasma etching chamberof claim 11, the method comprising the steps of: supporting thesemiconductor substrate on the substrate support surface positionedinside the chamber; supplying etching gas to the chamber; forming aplasma adjacent an exposed surface of the substrate; and etching one ormore layers formed on the semiconductor substrate with the plasma.
 21. Amethod of replacing the dielectric spacer ring in the plasma etchingchamber of claim 11, comprising removing the dielectric spacer ring fromthe chamber and replacing it with another dielectric spacer ring afteretching a predetermined number of semiconductor substrates.
 22. Adielectric spacer ring dimensioned so as to provide a clearance gapbetween a lower surface of a substrate located on a substrate supportsurface in a plasma etching chamber and an upper surface of thedielectric spacer ring, the dielectric spacer ring being furtherdimensioned so as to be surrounded by an edge ring dimensioned so as tounderlie the substrate and provide a clearance gap between a lowersurface of the substrate and an upper surface of the edge ring whereinthe dielectric spacer ring comprises an axially upward extending portionformed on a radially inner surface of a coupling ring.
 23. (canceled)24. (canceled)
 25. (canceled)
 26. (canceled)
 27. The dielectric spacerring of claim 22, wherein the dielectric spacer ring is made of quartzand has a width of from about 0.95 to 1.0 mm and a height of from about2.5 to 2.7 mm.
 28. The dielectric spacer ring of claim 22, wherein thedielectric spacer ring is adapted to surround an ESC in a plasma etchchamber and the dielectric spacer ring has a width less than an overhangof a wafer supported on the ESC.
 29. (canceled)
 30. The method of claim20, wherein the dielectric spacer ring reduces RF coupling into the edgering and increases RF coupling into the periphery of the substrate so asto increase the etch rate at the periphery of the substrate and decreasepolymer buildup at the underside and along the outer edge of thesubstrate compared to etching without the dielectric spacer ring. 31.The method of claim 20, wherein the etching includes an overetching stepand the substrate is substantially free of bevel polymer aftercompletion of the overetching.
 32. The method of claim 20, wherein theetching comprises etching a dielectric layer on the substrate.